Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9564344 | Ultra low silicon loss high dose implant strip | David Cheung, Haoquan Fang, Jack Kuo, Ilia Kalinovski, Zhao Li +2 more | 2017-02-07 |
| 9209000 | Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes | Huatan Qiu, Woody Chung, David Cheung | 2015-12-08 |
| 8864935 | Plasma generator apparatus | James A. Fair, Vincent Decaux, David Cheung, John H. Keller, Peter Jagusch | 2014-10-21 |
| 8591661 | Low damage photoresist strip method for low-K dielectrics | David Cheung, Ted Li, Kirk Ostrowski | 2013-11-26 |
| 8110068 | Gas flow distribution receptacles, plasma generator systems, and methods for performing plasma stripping processes | Huatan Qiu, Woody Chung, David Cheung | 2012-02-07 |