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Methods for stripping photoresist and/or cleaning metal regions |
Haruhiro Harry Goto, Martina Su, Frank Greer, Shamsuddin Alokozai |
2016-06-21 |
| 8435895 |
Methods for stripping photoresist and/or cleaning metal regions |
Haruhiro Harry Goto, Martina Martina, Frank Greer, Shamsuddin Alokozai |
2013-05-07 |
| 8058181 |
Method for post-etch cleans |
Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Senzi Li, Giuseppe Colangelo +2 more |
2011-11-15 |
| 7569492 |
Method for post-etch cleans |
Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Senzi Li, Giuseppe Colangelo +2 more |
2009-08-04 |
| 7390755 |
Methods for post etch cleans |
Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Senzi Li, Giuseppe Colangelo +2 more |
2008-06-24 |
| 6867086 |
Multi-step deposition and etch back gap fill process |
Robert Shepherd, Vishal Gauri, George D. Papasouliotis |
2005-03-15 |
| 6855225 |
Single-tube interlaced inductively coupling plasma source |
Yuh-Jia Su, Vincent Decaux |
2005-02-15 |
| 6693043 |
Method for removing photoresist from low-k films in a downstream plasma system |
Senzi Li, Helmuth Treichel, Kirk Ostrowski, Chevan Goonetilleke, Jim Su |
2004-02-17 |