Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9373497 | Methods for stripping photoresist and/or cleaning metal regions | Haruhiro Harry Goto, Martina Su, Frank Greer, Shamsuddin Alokozai | 2016-06-21 |
| 8435895 | Methods for stripping photoresist and/or cleaning metal regions | Haruhiro Harry Goto, Martina Martina, Frank Greer, Shamsuddin Alokozai | 2013-05-07 |
| 8058181 | Method for post-etch cleans | Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Senzi Li, Giuseppe Colangelo +2 more | 2011-11-15 |
| 7569492 | Method for post-etch cleans | Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Senzi Li, Giuseppe Colangelo +2 more | 2009-08-04 |
| 7390755 | Methods for post etch cleans | Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Senzi Li, Giuseppe Colangelo +2 more | 2008-06-24 |
| 6867086 | Multi-step deposition and etch back gap fill process | Robert Shepherd, Vishal Gauri, George D. Papasouliotis | 2005-03-15 |
| 6855225 | Single-tube interlaced inductively coupling plasma source | Yuh-Jia Su, Vincent Decaux | 2005-02-15 |
| 6693043 | Method for removing photoresist from low-k films in a downstream plasma system | Senzi Li, Helmuth Treichel, Kirk Ostrowski, Chevan Goonetilleke, Jim Su | 2004-02-17 |