Method for post-etch cleans

Assignee

• Novellus Systems
• Stmicroelectronics Sa

Inventors

• David Chen (8 patents)
• Yuh-Jia Su (20 patents)
• Eddie Chiu (10 patents)
• Maria Paola Pozzoli (3 patents)
• Senzi Li (4 patents)
• Giuseppe Colangelo (3 patents)
• Simone Alba (11 patents)
• Simona Petroni (3 patents)

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