| 8058181 |
Method for post-etch cleans |
David Chen, Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Senzi Li +2 more |
2011-11-15 |
| 7569492 |
Method for post-etch cleans |
David Chen, Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Senzi Li +2 more |
2009-08-04 |
| 7390755 |
Methods for post etch cleans |
David Chen, Yuh-Jia Su, Eddie Chiu, Maria Paola Pozzoli, Senzi Li +2 more |
2008-06-24 |
| 7288008 |
Nonlithographic method of defining geometries for plasma and/or ion implantation treatments on a semiconductor wafer |
Carmelo Romeo |
2007-10-30 |
| 7288427 |
Method for reducing defects after a metal etching in semiconductor devices |
Alessandro Spandre, Barbara Zanderighi |
2007-10-30 |
| 6998348 |
Method for manufacturing electronic circuits integrated on a semiconductor substrate |
Francesco Ciovacco, Roberto Colombo, Chiara Savardi |
2006-02-14 |
| 6638833 |
Process for the fabrication of integrated devices with reduction of damage from plasma |
Omar Vassalli |
2003-10-28 |
| 6495455 |
Method for enhancing selectivity between a film of a light-sensitive material and a layer to be etched in electronic semiconductor device fabrication processes |
Omar Vassalli |
2002-12-17 |
| 6233046 |
Method of measuring the thickness of a layer of silicon damaged by plasma etching |
Claudio Alfonso Giacomo Savoia, Enrico Bellandi, Francesca Canali |
2001-05-15 |
| 6051443 |
Method for assessing the effects of plasma treatments on wafers of semiconductor material |
Emilio Ghio, Andrea Colognese, Francois Maugain, Giovanni Rivera |
2000-04-18 |
| 5888836 |
Process for the repair of floating-gate non-volatile memories damaged by plasma treatment |
Emilio Ghio, Andrea Colognese |
1999-03-30 |