Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10768349 | Reflective diffraction grating and fabrication method | John Michael Miller, Hery Djie, Patrick Lu, Xiaowei Guo, Qinghong Du +1 more | 2020-09-08 |
| 9720147 | Reflective diffraction grating and fabrication method | John Michael Miller, Hery Djie, Patrick Lu, Xiaowei Guo, Qinghong Du +1 more | 2017-08-01 |
| 8058181 | Method for post-etch cleans | David Chen, Yuh-Jia Su, Maria Paola Pozzoli, Senzi Li, Giuseppe Colangelo +2 more | 2011-11-15 |
| 7569492 | Method for post-etch cleans | David Chen, Yuh-Jia Su, Maria Paola Pozzoli, Senzi Li, Giuseppe Colangelo +2 more | 2009-08-04 |
| 7390755 | Methods for post etch cleans | David Chen, Yuh-Jia Su, Maria Paola Pozzoli, Senzi Li, Giuseppe Colangelo +2 more | 2008-06-24 |
| 7160813 | Etch back process approach in dual source plasma reactors | Cindy W. Chen, Mavis J. Chaboya, Yuh-Jia Su | 2007-01-09 |
| 6955177 | Methods for post polysilicon etch photoresist and polymer removal with minimal gate oxide loss | Cindy W. Chen, Yuh-Jia Su, Wesley P. Graff | 2005-10-18 |
| 6459151 | Structure and process of via chain for misalignment test | Chi-Long Chung, Chun-Lin Chen, Sheng Fen Chiu | 2002-10-01 |
| 6146987 | Method for forming a contact plug over an underlying metal line using an etching stop layer | Chien-Chun Wang, Chung-Yi Chen, Hsien-Yuan Chang | 2000-11-14 |
| 6121154 | Techniques for etching with a photoresist mask | Barbara Haselden, John Lee, Chau Arima | 2000-09-19 |