Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7160813 | Etch back process approach in dual source plasma reactors | Cindy W. Chen, Eddie Chiu, Yuh-Jia Su | 2007-01-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7160813 | Etch back process approach in dual source plasma reactors | Cindy W. Chen, Eddie Chiu, Yuh-Jia Su | 2007-01-09 |