Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638833 | Process for the fabrication of integrated devices with reduction of damage from plasma | Simone Alba | 2003-10-28 |
| 6495455 | Method for enhancing selectivity between a film of a light-sensitive material and a layer to be etched in electronic semiconductor device fabrication processes | Simone Alba | 2002-12-17 |
| 6313041 | Method of enhancing the rate of removal of a layer of light-sensitive material after an etching step in the fabrication of semiconductor electronic devices | — | 2001-11-06 |