| 10329447 |
Polymer based roll coating |
— |
2019-06-25 |
| 6875091 |
Method and apparatus for conditioning a polishing pad with sonic energy |
Allan M. Radman, Alan J. Jensen, Robert G. Boehm, Jr., Michael S. Lacy, Eric A. Dunton |
2005-04-05 |
| 6693043 |
Method for removing photoresist from low-k films in a downstream plasma system |
Senzi Li, Kirk Ostrowski, Chevan Goonetilleke, Jim Su, David Chen |
2004-02-17 |
| 6543084 |
Wafer scrubbing brush core |
Tanlin Dickey, Julia Svirchevski, Donald Anderson, Mike Ravkin, Roy Winston Pascal +1 more |
2003-04-08 |
| 6261407 |
Method and apparatus for removal of thin films from wafers |
Michael Ravkin, Don E. Anderson, John M. de Larios |
2001-07-17 |
| 6240588 |
Wafer scrubbing brush core |
Tanlin Dickey, Julia Svirchevski, Donald Anderson, Mike Ravkin, Roy Winston Pascal +1 more |
2001-06-05 |
| 6187684 |
Methods for cleaning substrate surfaces after etch operations |
Jeffrey Farber, Allan M. Radman |
2001-02-13 |
| 6057229 |
Method for metallizing submicron contact holes in semiconductor bodies |
Konrad Hieber, Heinrich Koerner |
2000-05-02 |
| 5629053 |
Method for manufacturing microcrystalline cubic boron-nitride-layers |
Oswald Spindler, Rainer Braun, Bernhard Neureither, Thomas Kruck |
1997-05-13 |
| 5478780 |
Method and apparatus for producing conductive layers or structures for VLSI circuits |
Heinrich Koerner, Konrad Hieber, Peter Kuecher |
1995-12-26 |
| 5399389 |
Method for locally and globally planarizing chemical vapor deposition of SiO.sub.2 layers onto structured silicon substrates |
Konrad Hieber, Jasper Von Tomkewitsch, Oswald Spindler, Zvonimir Gabric, Alexander Gschwandtner |
1995-03-21 |
| 4990365 |
Method for producing silicon boronitride layers |
Oswald Spindler, Bernhard Neureither |
1991-02-05 |
| 4755486 |
Method of producing a defined arsenic doping in silicon semiconductor substrates |
Frank Becker |
1988-07-05 |
