| 6612315 |
Bowl, spin, rinse, and dry module, and method for loading a semiconductor wafer into a spin, rinse, and dry module |
Brian Bliven |
2003-09-02 |
| 6558474 |
Method for rinsing the backside of a semiconductor wafer |
— |
2003-05-06 |
| 6543084 |
Wafer scrubbing brush core |
Tanlin Dickey, Julia Svirchevski, Donald Anderson, Mike Ravkin, Helmuth Treichel +1 more |
2003-04-08 |
| 6505417 |
Method for controlling airflow on a backside of a semiconductor wafer during spin processing |
Brian Bliven |
2003-01-14 |
| 6497241 |
Hollow core spindle and spin, rinse, and dry module including the same |
— |
2002-12-24 |
| 6434775 |
Nozzle for rinsing the backside of a semiconductor wafer |
— |
2002-08-20 |
| 6415804 |
Bowl for processing semiconductor wafers |
Brian Bliven |
2002-07-09 |
| 6240588 |
Wafer scrubbing brush core |
Tanlin Dickey, Julia Svirchevski, Donald Anderson, Mike Ravkin, Helmuth Treichel +1 more |
2001-06-05 |
