Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7807563 | Method for manufacturing a layer arrangement and layer arrangement | Werner Pamler, Guenther Schindler, Gernot Steinlesberger, Andreas Stich, Martin Traving +1 more | 2010-10-05 |
| 7755160 | Plasma excited chemical vapor deposition method silicon/oxygen/nitrogen-containing-material and layered assembly | Werner Pamler, Guenther Schindler | 2010-07-13 |
| 7276300 | Microelectronic structure having a hydrogen barrier layer | Walter Hartner, Matthias Kronke, Gunther Schindler | 2007-10-02 |
| 7259441 | Hollow structure in an integrated circuit and method for producing such a hollow structure in an integrated circuit | Werner Pamler, Siegfried Schwarzl | 2007-08-21 |
| 7033926 | Strip conductor arrangement and method for producing a strip conductor arrangement | Gunther Schindler, Werner Pamler | 2006-04-25 |
| 7023063 | Arrangement of microstructures | Werner Pamler, Siegfried Schwarzl | 2006-04-04 |
| 6825098 | Method for fabricating microstructures and arrangement of microstructures | Werner Pamler, Siegfried Schwarzl | 2004-11-30 |
| 6737692 | Method for fabricating a component, and component having a metal layer and an insulation layer | Werner Pamler, Volker Weinrich | 2004-05-18 |
| 6686643 | Substrate with at least two metal structures deposited thereon, and method for fabricating the same | Siegfried Schwarzl, Werner Pamler | 2004-02-03 |
| 6649468 | Method for fabricating a microelectronic component | Gunther Schindler, Walter Hartner | 2003-11-18 |
| 6551902 | Process for fabricating a buried, laterally insulated zone of increased conductivity in a semiconductor substrate | Norbert Elbel, Bernhard Neureither | 2003-04-22 |
| 6429092 | Collar formation by selective oxide deposition | Jochen Beintner, Alexander Michaelis, Ulrike Gruening, Oswald Spindler | 2002-08-06 |
| 6380074 | Deposition of various base layers for selective layer growth in semiconductor production | Markus Kirchhoff, Hans-Peter Sperlich, Uwe Schilling, Oswald Spindler, Stephan Wege +1 more | 2002-04-30 |
| 6184091 | Formation of controlled trench top isolation layers for vertical transistors | Ulrike Gruening, Jochen Beintner, Dirk Tobben, Gill Yong Lee, Oswald Spindler | 2001-02-06 |
| 6177698 | Formation of controlled trench top isolation layers for vertical transistors | Ulrike Gruening, Jochen Beintner, Dirk Tobben, Gill Yong Lee, Oswald Spindler | 2001-01-23 |
| 5965203 | Method for depositing a silicon oxide layer | Oswald Spindler | 1999-10-12 |
| 5837611 | Production method for an insulation layer functioning as an intermetal dielectric | Oswald Spindler, Thomas Grassl | 1998-11-17 |
| 5399389 | Method for locally and globally planarizing chemical vapor deposition of SiO.sub.2 layers onto structured silicon substrates | Konrad Hieber, Jasper Von Tomkewitsch, Oswald Spindler, Helmuth Treichel, Alexander Gschwandtner | 1995-03-21 |
| 5281302 | Method for cleaning reaction chambers by plasma etching | Alexander Gschwandtner, Oswald Spindler | 1994-01-25 |