Issued Patents All Time
Showing 1–25 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8501373 | Passivation of multi-layer mirror for extreme ultraviolet lithography | Stefan Wurm | 2013-08-06 |
| 8076055 | Passivation of multi-layer mirror for extreme ultraviolet lithography | Stefan Wurm | 2011-12-13 |
| 7859648 | Passivation of multi-layer mirror for extreme ultraviolet lithography | Stefan Wurm | 2010-12-28 |
| 7626682 | Reticle stages for lithography systems and lithography methods | Stefan Wurm | 2009-12-01 |
| 7417736 | Method for determining a radiation power and an exposure apparatus | Stefan Wurm | 2008-08-26 |
| 7407729 | EUV magnetic contrast lithography mask and manufacture thereof | Stefan Wurm | 2008-08-05 |
| 7341875 | Semiconductor memory device with a capacitor formed therein and a method for forming the same | Joachim Nuetzel, Till Schloesser, Stefan Wurn | 2008-03-11 |
| 7332444 | Method for smoothing areas in structures by utilizing the surface tension | Wolf-Dieter Domke | 2008-02-19 |
| 7323821 | Device for generating and/or influencing electromagnetic radiation from a plasma | Stefan Wurm | 2008-01-29 |
| 7316933 | Method for producing an annular microstructure element | Alfred Kersch, Wolfgang Raberg | 2008-01-08 |
| RE39799 | Memory cell array and method for manufacturing it | — | 2007-08-28 |
| 7259441 | Hollow structure in an integrated circuit and method for producing such a hollow structure in an integrated circuit | Werner Pamler, Zvonimir Gabric | 2007-08-21 |
| 7078134 | Photolithographic mask having a structure region covered by a thin protective coating of only a few atomic layers and methods for the fabrication of the mask including ALCVD to form the thin protective coating | Stefan Wurm | 2006-07-18 |
| 7064439 | Integrated electrical circuit and method for fabricating it | Jorg Berthold | 2006-06-20 |
| 7029808 | Photosensitive coating material for a substrate and process for exposing the coated substrate | Jenspeter Rau, Stefan Wurm | 2006-04-18 |
| 7023063 | Arrangement of microstructures | Zvonimir Gabric, Werner Pamler | 2006-04-04 |
| 6943393 | Memory cell arrangement and method of fabricating it | Stefan Miethaner, Annette Saenger | 2005-09-13 |
| 6930052 | Method for producing an integrated circuit having at least one metalicized surface | Manfred Engelhardt, Franz Kreupl | 2005-08-16 |
| 6925002 | Semiconductor memory having mutually crossing word and bit lines, at which magnetoresistive memory cells are arranged | — | 2005-08-02 |
| 6872495 | Method for fabricating a lithographic reflection mask in particular for the patterning of a semiconductor wafer, and a reflection mask | — | 2005-03-29 |
| 6849365 | Reflection mask for EUV-lithography and method for fabricating the reflection mask | Stefan Wurm | 2005-02-01 |
| 6825098 | Method for fabricating microstructures and arrangement of microstructures | Zvonimir Gabric, Werner Pamler | 2004-11-30 |
| 6717843 | Polyvalent, magnetoresistive write/read memory and method for writing and reading a memory of this type | Roland Thewes, Werner Weber | 2004-04-06 |
| 6686643 | Substrate with at least two metal structures deposited thereon, and method for fabricating the same | Werner Pamler, Zvonimir Gabric | 2004-02-03 |
| 6630703 | Magnetoresistive memory cell configuration and method for its production | Ulrich Scheler | 2003-10-07 |