Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7408646 | Method and apparatus for determining local variation of the reflection or transmission behavior over a mask surface | Frank-Michael Kamm | 2008-08-05 |
| 7400379 | Apparatus for measuring an exposure intensity on a wafer | Silvio Teuber | 2008-07-15 |
| 7229723 | Method for forming an opening in a light-absorbing layer on a mask | — | 2007-06-12 |
| 7090948 | Reflection mask and method for fabricating the reflection mask | — | 2006-08-15 |
| 7060399 | Reflective mirror for lithographic exposure and production method | Frank-Michael Kamm | 2006-06-13 |
| 7029808 | Photosensitive coating material for a substrate and process for exposing the coated substrate | Siegfried Schwarzl, Stefan Wurm | 2006-04-18 |
| 6707123 | EUV reflection mask | — | 2004-03-16 |