Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11341232 | Smart card as a security token | Volker Stöhr, Nils Gerhardt, Andreas Chalupar | 2022-05-24 |
| 11343074 | Block-chain based identity system | — | 2022-05-24 |
| 11258777 | Method for carrying out a two-factor authentication | Volker Stöhr, Nils Gerhardt | 2022-02-22 |
| 11184343 | Method for carrying out an authentication | Volker Stöhr, Nils Gerhardt, Andreas Chalupar | 2021-11-23 |
| 10764260 | Distributed processing of a product on the basis of centrally encrypted stored data | Volker Stöhr | 2020-09-01 |
| 7588867 | Reflection mask, use of the reflection mask and method for fabricating the reflection mask | Rainer Pforr, Christian Crell | 2009-09-15 |
| 7489386 | System and method for projecting a pattern from a mask onto a substrate | Rainer Pforr | 2009-02-10 |
| 7408646 | Method and apparatus for determining local variation of the reflection or transmission behavior over a mask surface | Jenspeter Rau | 2008-08-05 |
| 7376512 | Method for determining an optimal absorber stack geometry of a lithographic reflection mask | Stefan Hirscher | 2008-05-20 |
| 7166393 | Reflection mask for projecting a structure onto a semiconductor wafer and method for producing the mask | — | 2007-01-23 |
| 7094507 | Method for determining an optimal absorber stack geometry of a lithographic reflection mask | Stefan Hirscher | 2006-08-22 |
| 7078135 | Method for patterning a mask layer and semiconductor product | Christof Matthias Schilz | 2006-07-18 |
| 7073969 | Method for fabricating a photomask for an integrated circuit and corresponding photomask | — | 2006-07-11 |
| 7060399 | Reflective mirror for lithographic exposure and production method | Jenspeter Rau | 2006-06-13 |
| 6841786 | Method and configuration for compensating for unevenness in the surface of a substrate | — | 2005-01-11 |
| 6835508 | Large-area membrane mask and method for fabricating the mask | Jörg Butschke, Albrecht Ehrmann, Ernst Haugeneder, Florian Letzkus, Hans Loschner +1 more | 2004-12-28 |
| 6773854 | Method of producing a perforated mask for particle radiation | Albrecht Ehrmann, Ernst Haugeneder, Alexander Petraschenko, Stefan Schunck | 2004-08-10 |