Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7588867 | Reflection mask, use of the reflection mask and method for fabricating the reflection mask | Frank-Michael Kamm, Rainer Pforr | 2009-09-15 |
| 6970589 | Method for inspecting defects on a mask | — | 2005-11-29 |
| 6841316 | Method for producing a phase shift mask | — | 2005-01-11 |