Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835508 | Large-area membrane mask and method for fabricating the mask | Jörg Butschke, Albrecht Ehrmann, Frank-Michael Kamm, Florian Letzkus, Hans Loschner +1 more | 2004-12-28 |
| 6773854 | Method of producing a perforated mask for particle radiation | Albrecht Ehrmann, Frank-Michael Kamm, Alexander Petraschenko, Stefan Schunck | 2004-08-10 |
| 6696371 | Method for fabricating positionally exact surface-wide membrane masks | Joerg Butschke, Albrecht Ehrmann, Florian Letzkus, Reinhard Springer | 2004-02-24 |
| 6472673 | Lithographic method for producing an exposure pattern on a substrate | Alfred Chalupka | 2002-10-29 |