Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7388217 | Particle-optical projection system | Herbert Buschbeck, Gertraud Lammer, Robert Nowak, Elmar Platzgummer, Gerhard Stengl | 2008-06-17 |
| 7084411 | Pattern-definition device for maskless particle-beam exposure apparatus | Wolfgang Lammer-Pachlinger, Gertraud Lammer | 2006-08-01 |
| 6768125 | Maskless particle-beam system for exposing a pattern on a substrate | Elmar Platzgummer, Hans Loeschner, Gerhard Stengl, Herbert Vonach, Gertraud Lammer +3 more | 2004-07-27 |
| 6661015 | Pattern lock system | Gerhard Stengl, Hans Loschner, Robert Nowak, Stefan Eder | 2003-12-09 |
| 6472673 | Lithographic method for producing an exposure pattern on a substrate | Ernst Haugeneder | 2002-10-29 |
| 6326632 | Particle-optical imaging system for lithography purposes | Herbert Buschbeck, Gertraud Lammer, Hans Loeschner, Gerhard Stengl | 2001-12-04 |
| 6194730 | Electrostatic lens | Gerhard Stengl | 2001-02-27 |
| 5876880 | Process for producing a structured mask | Herbert Vonach, Hans Loschner | 1999-03-02 |
| 5874739 | Arrangement for shadow-casting lithography | Herbert Buschbeck, Hans Loeschner, Gerhard Stengl, Herbert Vonach | 1999-02-23 |
| 5801388 | Particle beam, in particular ionic optic imaging system | Gerhard Stengl, Herbert Vonach | 1998-09-01 |
| 5742062 | Arrangement for masked beam lithography by means of electrically charged particles | Gerhard Stengl, Herbert Vonach, Hans Loeschner | 1998-04-21 |
| 5693950 | Projection system for charged particles | Gerhard Stengl, Herbert Vonach | 1997-12-02 |
| 5436460 | Ion-optical imaging system | Gerhard Stengl, Herbert Vonach | 1995-07-25 |
| 5378917 | Particle-beam imaging system | Gerhard Stengl, Herbert Vonach | 1995-01-03 |
| 5350924 | Ion-optical imaging system | Gerhard Stengl | 1994-09-27 |
| 5317161 | Ion source | Gertraud Lammer, Gerhard Stengl, Peter Wolf, Johannes Fegerl | 1994-05-31 |
| 4916322 | Arrangement for stabilizing an irradiated mask | Hilton F. Glavish, Hans Loschner, Gerhard Stengel | 1990-04-10 |