Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049189 | Charged particle system | Herbert Buschbeck, Elmar Platzgummer, Gerhard Stengl | 2011-11-01 |
| 6989546 | Particle multibeam lithography | Hans Loschner, Gerhard Stengl, Elmar Platzgummer | 2006-01-24 |
| 6768125 | Maskless particle-beam system for exposing a pattern on a substrate | Elmar Platzgummer, Hans Loeschner, Gerhard Stengl, Alfred Chalupka, Gertraud Lammer +3 more | 2004-07-27 |
| 5876880 | Process for producing a structured mask | Alfred Chalupka, Hans Loschner | 1999-03-02 |
| 5874739 | Arrangement for shadow-casting lithography | Herbert Buschbeck, Alfred Chalupka, Hans Loeschner, Gerhard Stengl | 1999-02-23 |
| 5801388 | Particle beam, in particular ionic optic imaging system | Gerhard Stengl, Alfred Chalupka | 1998-09-01 |
| 5742062 | Arrangement for masked beam lithography by means of electrically charged particles | Gerhard Stengl, Alfred Chalupka, Hans Loeschner | 1998-04-21 |
| 5693950 | Projection system for charged particles | Gerhard Stengl, Alfred Chalupka | 1997-12-02 |
| 5436460 | Ion-optical imaging system | Gerhard Stengl, Alfred Chalupka | 1995-07-25 |
| 5378917 | Particle-beam imaging system | Alfred Chalupka, Gerhard Stengl | 1995-01-03 |