Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8049189 | Charged particle system | Elmar Platzgummer, Gerhard Stengl, Herbert Vonach | 2011-11-01 |
| 7772574 | Pattern lock system for particle-beam exposure apparatus | Gerhard Stengl, Robert Nowak | 2010-08-10 |
| 7436120 | Compensation of magnetic fields | Gerhard Stengl | 2008-10-14 |
| 7388217 | Particle-optical projection system | Gertraud Lammer, Alfred Chalupka, Robert Nowak, Elmar Platzgummer, Gerhard Stengl | 2008-06-17 |
| 7199373 | Particle-optic electrostatic lens | Gerhard Stengl, Gertraud Lammer | 2007-04-03 |
| 6768125 | Maskless particle-beam system for exposing a pattern on a substrate | Elmar Platzgummer, Hans Loeschner, Gerhard Stengl, Herbert Vonach, Alfred Chalupka +3 more | 2004-07-27 |
| 6326632 | Particle-optical imaging system for lithography purposes | Alfred Chalupka, Gertraud Lammer, Hans Loeschner, Gerhard Stengl | 2001-12-04 |
| 5874739 | Arrangement for shadow-casting lithography | Alfred Chalupka, Hans Loeschner, Gerhard Stengl, Herbert Vonach | 1999-02-23 |