Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8222621 | Method for maskless particle-beam exposure | Heinrich Fragner, Elmar Platzgummer, Adrian Bürli | 2012-07-17 |
| 7772574 | Pattern lock system for particle-beam exposure apparatus | Gerhard Stengl, Herbert Buschbeck | 2010-08-10 |
| 7388217 | Particle-optical projection system | Herbert Buschbeck, Gertraud Lammer, Alfred Chalupka, Elmar Platzgummer, Gerhard Stengl | 2008-06-17 |
| 6768125 | Maskless particle-beam system for exposing a pattern on a substrate | Elmar Platzgummer, Hans Loeschner, Gerhard Stengl, Herbert Vonach, Alfred Chalupka +3 more | 2004-07-27 |
| 6661015 | Pattern lock system | Alfred Chalupka, Gerhard Stengl, Hans Loschner, Stefan Eder | 2003-12-09 |