Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8222621 | Method for maskless particle-beam exposure | Heinrich Fragner, Elmar Platzgummer, Robert Nowak | 2012-07-17 |
| 8057972 | Constant current multi-beam patterning | Heinrich Fragner, Elmar Platzgummer | 2011-11-15 |