Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386050 | Compensation method for obtaining phase-coherent still images with a bistatic radar | — | 2025-08-12 |
| 8278635 | Global point spreading function in multi-beam patterning | Elmar Platzgummer, Stefan Cernusca | 2012-10-02 |
| 8258488 | Compensation of dose inhomogeneity and image distortion | Elmar Platzgummer, Stefan Cernusca | 2012-09-04 |
| 8222621 | Method for maskless particle-beam exposure | Elmar Platzgummer, Robert Nowak, Adrian Bürli | 2012-07-17 |
| 8198601 | Method for producing a multi-beam deflector array device having electrodes | Elmar Platzgummer | 2012-06-12 |
| 8057972 | Constant current multi-beam patterning | Elmar Platzgummer, Adrian Bürli | 2011-11-15 |
| 7777201 | Method for maskless particle-beam exposure | Elmar Platzgummer | 2010-08-17 |