Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8304749 | Charged-particle exposure apparatus with electrostatic zone plate | Elmar Platzgummer | 2012-11-06 |
| 8278635 | Global point spreading function in multi-beam patterning | Elmar Platzgummer, Heinrich Fragner | 2012-10-02 |
| 8258488 | Compensation of dose inhomogeneity and image distortion | Elmar Platzgummer, Heinrich Fragner | 2012-09-04 |
| 7737422 | Charged-particle exposure apparatus | Elmar Platzgummer, Gerhard Stengl | 2010-06-15 |
| 7276714 | Advanced pattern definition for particle-beam processing | Elmar Platzgummer | 2007-10-02 |