Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8546767 | Pattern definition device with multiple multibeam array | Elmar Platzgummer | 2013-10-01 |
| 6909103 | Ion irradiation of a target at very high and very low kinetic ion energies | Elmar Platzgummer, Gerhard Stengl | 2005-06-21 |
| 6768125 | Maskless particle-beam system for exposing a pattern on a substrate | Elmar Platzgummer, Gerhard Stengl, Herbert Vonach, Alfred Chalupka, Gertraud Lammer +3 more | 2004-07-27 |
| 6326632 | Particle-optical imaging system for lithography purposes | Herbert Buschbeck, Alfred Chalupka, Gertraud Lammer, Gerhard Stengl | 2001-12-04 |
| 5874739 | Arrangement for shadow-casting lithography | Herbert Buschbeck, Alfred Chalupka, Gerhard Stengl, Herbert Vonach | 1999-02-23 |
| 5742062 | Arrangement for masked beam lithography by means of electrically charged particles | Gerhard Stengl, Alfred Chalupka, Herbert Vonach | 1998-04-21 |