Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7388217 | Particle-optical projection system | Herbert Buschbeck, Alfred Chalupka, Robert Nowak, Elmar Platzgummer, Gerhard Stengl | 2008-06-17 |
| 7199373 | Particle-optic electrostatic lens | Gerhard Stengl, Herbert Buschbeck | 2007-04-03 |
| 7084411 | Pattern-definition device for maskless particle-beam exposure apparatus | Wolfgang Lammer-Pachlinger, Alfred Chalupka | 2006-08-01 |
| 6768125 | Maskless particle-beam system for exposing a pattern on a substrate | Elmar Platzgummer, Hans Loeschner, Gerhard Stengl, Herbert Vonach, Alfred Chalupka +3 more | 2004-07-27 |
| 6326632 | Particle-optical imaging system for lithography purposes | Herbert Buschbeck, Alfred Chalupka, Hans Loeschner, Gerhard Stengl | 2001-12-04 |
| 5317161 | Ion source | Alfred Chalupka, Gerhard Stengl, Peter Wolf, Johannes Fegerl | 1994-05-31 |