Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7376512 | Method for determining an optimal absorber stack geometry of a lithographic reflection mask | Frank-Michael Kamm | 2008-05-20 |
| 7094507 | Method for determining an optimal absorber stack geometry of a lithographic reflection mask | Frank-Michael Kamm | 2006-08-22 |