Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7316933 | Method for producing an annular microstructure element | Wolfgang Raberg, Siegfried Schwarzl | 2008-01-08 |
| 7022209 | PVD method and PVD apparatus | Winfried Sabisch, Georg Schulze-Icking, Thomas Witke, Ralf Zedlitz | 2006-04-04 |
| 6977405 | Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating it | Jorn Lutzen, Bernd Goebel, Dirk Schumann, Martin Gutsche, Harald Seidl +2 more | 2005-12-20 |
| 6716748 | Reaction chamber for processing a substrate wafer, and method for processing a substrate using the chamber | — | 2004-04-06 |
| 6660637 | Process for chemical mechanical polishing | Stephanie Delage, Johannes Baumgartl | 2003-12-09 |
| 6649521 | Method for determining the relevant ion and particle flows in i-PVD processes | Alexander Ruf | 2003-11-18 |
| 6579758 | Method and installation for fabricating one-sided buried straps | Bernd Gobel, Martin Gutsche, Werner Steinhogl | 2003-06-17 |
| 6524448 | Configuration for the execution of a plasma based sputter process | Ralf Brinkmann | 2003-02-25 |
| 6458603 | Method of fabricating a micro-technical structure, and micro-technical component | Siegfried Schwarzl, Stefan Miethaner, Hermann Wendt | 2002-10-01 |
| 6413886 | Method for fabricating a microtechnical structure | Georg Schulze-Icking | 2002-07-02 |
| 5998767 | Apparatus for processing a substrate wafer and method for operating same | Thomas Schafbauer | 1999-12-07 |
| 5505833 | Method for depositing a layer on a substrate wafer with a sputtering process | Christoph Werner | 1996-04-09 |