Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965809 | Method for characterizing and simulating a chemical mechanical polishing process | Wolfgang Dickenscheid, Frank Meyer, Gotz Springer | 2005-11-15 |
| 6660637 | Process for chemical mechanical polishing | Alfred Kersch, Johannes Baumgartl | 2003-12-09 |