Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9312172 | Semiconductor device and method for making same | Dirk Meinhold, Heinrich Koerner | 2016-04-12 |
| 9305798 | Device and method for stopping etching process | Lothar Brencher, Dirk Meinhold, Michael Hartenberger, Georg Seidemann | 2016-04-05 |
| 9263328 | Semiconductor device and method for making same | Dirk Meinhold, Heinrich Koerner | 2016-02-16 |
| 8994179 | Semiconductor device and method for making same | Dirk Meinhold, Heinrich Koerner | 2015-03-31 |
| 8470670 | Method for making semiconductor device | John Power, Danny Pak-Chum Shum, Robert Strenz | 2013-06-25 |
| 6965809 | Method for characterizing and simulating a chemical mechanical polishing process | Frank Meyer, Stephanie Delage, Gotz Springer | 2005-11-15 |
| 6833324 | Process and device for cleaning a semiconductor wafer | Grit Bonsdorf | 2004-12-21 |
| 6068540 | Polishing device and polishing cloth for semiconductor substrates | Goetz Springer | 2000-05-30 |