Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9305798 | Device and method for stopping etching process | Lothar Brencher, Dirk Meinhold, Georg Seidemann, Wolfgang Dickenscheid | 2016-04-05 |
| 8404597 | Device and method for stopping an etching process | Lothar Brencher, Dirk Meinhold, Georg Seidemann, Wolfgang Dickenscheld | 2013-03-26 |