Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8404597 | Device and method for stopping an etching process | Lothar Brencher, Dirk Meinhold, Michael Hartenberger, Georg Seidemann | 2013-03-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8404597 | Device and method for stopping an etching process | Lothar Brencher, Dirk Meinhold, Michael Hartenberger, Georg Seidemann | 2013-03-26 |