Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9543157 | Method for processing a carrier, a method for operating a plasma processing chamber, and a method for processing a semiconductor wafer | Michael Renner | 2017-01-10 |
| 9305798 | Device and method for stopping etching process | Dirk Meinhold, Michael Hartenberger, Georg Seidemann, Wolfgang Dickenscheid | 2016-04-05 |
| 9082719 | Method for removing a dielectric layer from a bottom of a trench | Carsten Moritz | 2015-07-14 |
| 8404597 | Device and method for stopping an etching process | Dirk Meinhold, Michael Hartenberger, Georg Seidemann, Wolfgang Dickenscheld | 2013-03-26 |
| 6475919 | Method for producing trenches for DRAM cell configurations | Maik Stegememann, Uwe Rudolph | 2002-11-05 |