Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6965809 | Method for characterizing and simulating a chemical mechanical polishing process | Wolfgang Dickenscheid, Frank Meyer, Stephanie Delage | 2005-11-15 |
| 6257955 | Apparatus and method for heating a liquid or viscous polishing agent, and device for polishing wafers | Wolfgang Diewald, Andre Richter | 2001-07-10 |