Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7022209 | PVD method and PVD apparatus | Winfried Sabisch, Alfred Kersch, Thomas Witke, Ralf Zedlitz | 2006-04-04 |
| 6797613 | Process for depositing WSix layers on a high topography with a defined stoichiometry | Bernhard Sell, Annette Sanger | 2004-09-28 |
| 6413886 | Method for fabricating a microtechnical structure | Alfred Kersch | 2002-07-02 |