Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7045070 | Method of producing an electrode configuration and method of electrically contacting the electrode configuration | Manfred Engelhardt, Werner Pamler, Hermann Wendt | 2006-05-16 |
| 6852240 | Method of manufacturing a ferroelectric capacitor configuration | Walter Hartner, Gunther Schindler, Igor Kasko | 2005-02-08 |
| 6825116 | Method for removing structures | Gerhard Beitel, Mattias Ahlstedt, Walter Hartner, Gunther Schindler, Marcus Kastner | 2004-11-30 |
| 6818503 | Method for fabricating a semiconductor memory device | Rainer Bruchhaus, Gerhard Enders, Walter Hartner, Igor Kasko, Matthias Kronke +3 more | 2004-11-16 |
| 6790676 | Method for producing a ferroelectric layer | Hans Cerva, Walter Hartner, Frank Hintermaier, Joachim Hoepfner, Guenther Schindler +1 more | 2004-09-14 |
| 6737692 | Method for fabricating a component, and component having a metal layer and an insulation layer | Zvonimir Gabric, Werner Pamler | 2004-05-18 |
| 6734459 | Semiconductor memory cell | — | 2004-05-11 |
| 6730562 | Method of patterning ferroelectric layers | Manfred Engelhardt, Walter Hartner, Frank Hintermaier, Gunther Schindler | 2004-05-04 |
| 6716643 | Method for producing a semiconductor memory element | Manfred Engelhardt | 2004-04-06 |
| 6708405 | Method for producing an electrically conducting connection | Barbara Hasler, Rainer Florian Schnabel, Guenther Schindler | 2004-03-23 |
| 6656376 | Process for cleaning CVD units | Elke Fritsch, Christine Dehm, Hermann Wendt | 2003-12-02 |
| 6649483 | Method for fabricating a capacitor configuration | Walter Hartner, Matthias Kronke | 2003-11-18 |
| 6649424 | Method for fabricating an integrated semiconductor circuit having a strongly polarizable dielectric or ferroelectric | Manfred Mört, Walter Hartner, Gunther Schindler | 2003-11-18 |
| 6613640 | Method for fabricating an integrated ferroelectric semiconductor memory and integrated ferroelectric semiconductor memory | Ihar Kasko, Matthias Kronke | 2003-09-02 |
| 6593228 | Method of fabricating a patterned metal-containing layer on a semiconductor wafer | Gerhard Beitel, Andreas Hauser, Peter Bosk | 2003-07-15 |
| 6586348 | Method for preventing etching-induced damage to a metal oxide film by patterning the film after a nucleation anneal but while still amorphous and then thermally annealing to crystallize | Walter Hartner, Gunther Schindler, Frank Hintermaier | 2003-07-01 |
| 6566220 | Method for fabricating a semiconductor memory component | Manfred Engelhardt, Franz Kreupl, Manuela Schiele | 2003-05-20 |
| 6537900 | Method for patterning a metal or metal silicide layer and a capacitor structure fabricated by the method | Carlos Mazure-Espejo, Gunther Schindler | 2003-03-25 |
| 6503792 | Method for fabricating a patterned metal-oxide-containing layer | Walter Hartner, Gunther Schindler, Mattias Ahlstedt | 2003-01-07 |
| 6495415 | Method for fabricating a patterned layer | Walter Hartner, Igor Kasko, Frank Hintermaier, Gunther Schindler, Hermann Wendt | 2002-12-17 |
| 6454956 | Structuring method | Manfred Engelhardt | 2002-09-24 |
| 6315913 | Structuring method | Manfred Engelhardt | 2001-11-13 |
| 6296777 | Structuring process | Manfred Engelhardt | 2001-10-02 |
| 6258658 | Memory cell configuration and corresponding fabrication method | Thomas Böhm, Manfred Hain, Armin Kohlhase, Yoichi Otani, Andreas Rusch +1 more | 2001-07-10 |
| 6210595 | Method for producing structures having a high aspect ratio and structure having a high aspect ratio | Manfred Engelhardt | 2001-04-03 |