ED

Eric A. Dunton

Lam Research: 1 patents #1,364 of 2,128Top 65%
Overall (All Time): #3,445,220 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
6875091 Method and apparatus for conditioning a polishing pad with sonic energy Allan M. Radman, Alan J. Jensen, Helmuth Treichel, Robert G. Boehm, Jr., Michael S. Lacy 2005-04-05