Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8691023 | Methods and apparatus for cleaning deposition chamber parts using selective spray etch | Liyuan Bao, Samantha Tan | 2014-04-08 |
| 8398779 | Non destructive selective deposition removal of non-metallic deposits from aluminum containing substrates | Liyuan Bao, Sio On Lo, Yukari Nishimura, Joseph F. Sommers, Samantha Tan | 2013-03-19 |
| 7270761 | Fluorine free integrated process for etching aluminum including chamber dry clean | Xikun Wang, Hui Chen, Hong Shih, Steve S. Y. Mak | 2007-09-18 |
| 6852242 | Cleaning of multicompositional etchant residues | Zhi-Wen Sun, Tuo-Chuan Huang | 2005-02-08 |