Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293919 | Alternating etch and passivation process | Jengyi Yu, Chen-Wei Liang, Alan J. Jensen, Samantha Tan | 2025-05-06 |
| 12191125 | Removing metal contamination from surfaces of a processing chamber | Jengyi Yu, Samantha Tan, Ge Yuan, Siva Kanakasabapathy | 2025-01-07 |
| 12183589 | Tin oxide mandrels in patterning | Jengyi Yu, Samantha Tan, Boris Volosskiy, Sivananda K. Kanakasabapathy, Richard Wise +2 more | 2024-12-31 |
| 11848212 | Alternating etch and passivation process | Jengyi Yu, Chen-Wei Liang, Alan J. Jensen, Samantha Tan | 2023-12-19 |
| 11842888 | Removing metal contamination from surfaces of a processing chamber | Jengyi Yu, Samantha Tan, Ge Yuan, Siva Kanakasabapathy | 2023-12-12 |
| 11551938 | Alternating etch and passivation process | Jengyi Yu, Chen-Wei Liang, Alan J. Jensen, Samantha Tan | 2023-01-10 |
| 11355353 | Tin oxide mandrels in patterning | Jengyi Yu, Samantha Tan, Boris Volosskiy, Sivananda K. Kanakasabapathy, Richard Wise +2 more | 2022-06-07 |
| 9412609 | Highly selective oxygen free silicon nitride etch | Bhaskar Nagabhirava, Chih-Hsiang Wu, Ying-Ren Chen | 2016-08-09 |
| 8871105 | Method for achieving smooth side walls after Bosch etch process | Jaroslaw W. Winniczek, Frank Y. Lin, Alan J. Miller, Qing Xu, Jin-Hwan Ham +2 more | 2014-10-28 |