Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266542 | Atomic layer etching for subtractive metal etch | Wenbing Yang, Samantha Tan, Shih-Ked Lee, Yiwen FAN, Wook Choi +3 more | 2025-04-01 |
| 11935758 | Atomic layer etching for subtractive metal etch | Wenbing Yang, Samantha Tan, Shih-Ked Lee, Yiwen FAN, Wook Choi +3 more | 2024-03-19 |
| 11521860 | Selectively etching for nanowires | Jun Xue, Samantha Tan, Yuanhui Li, Daniel Peter, Alexander Kabansky | 2022-12-06 |
| 11450513 | Atomic layer etching and smoothing of refractory metals and other high surface binding energy materials | Wenbing Yang, Tamal Mukherjee, Samantha Tan, Yang Pan, Keren Jacobs Kanarik | 2022-09-20 |