Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417902 | Method for cleaning a chamber | Ran Lin, Wenbing Yang, Tamal Mukherjee, Jengyi Yu, Samantha Tan +1 more | 2025-09-16 |
| 12266542 | Atomic layer etching for subtractive metal etch | Wenbing Yang, Mohand Brouri, Samantha Tan, Shih-Ked Lee, Wook Choi +3 more | 2025-04-01 |
| 12256645 | Chemical etch nonvolatile materials for MRAM patterning | Wenbing Yang, Tamal Mukherjee, Zhongwei Zhu, Samantha Tan, Ran Lin +2 more | 2025-03-18 |
| 12105422 | Photoresist development with halide chemistries | Samantha Tan, Jengyi Yu, Da Li, Yang Pan, Jeffrey Marks +5 more | 2024-10-01 |
| 11935758 | Atomic layer etching for subtractive metal etch | Wenbing Yang, Mohand Brouri, Samantha Tan, Shih-Ked Lee, Wook Choi +3 more | 2024-03-19 |