Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400842 | Method of cleaning chamber components with metal etch residues | Wenbing Yang, Samantha Tan, Ran Lin, Tamal Mukherjee, Chunhong Zhou +2 more | 2025-08-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400842 | Method of cleaning chamber components with metal etch residues | Wenbing Yang, Samantha Tan, Ran Lin, Tamal Mukherjee, Chunhong Zhou +2 more | 2025-08-26 |