Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10056264 | Atomic layer etching of GaN and other III-V materials | Wenbing Yang, Tomihito Ohba, Samantha Tan, Keren Jacobs Kanarik, Jeffrey Marks | 2018-08-21 |
| 7737023 | Method of manufacture of semiconductor integrated circuit device and semiconductor integrated circuit device | Shouochi Uno, Atsushi Maekawa, Takashi Yunogami, Kazutami Tago, Shuntaro Machida +1 more | 2010-06-15 |
| 7419902 | Method of manufacture of semiconductor integrated circuit | Shouochi Uno, Atsushi Maekawa, Takashi Yunogami, Kazutami Tago, Shuntaro Machida +1 more | 2008-09-02 |
| 7288156 | Methods for cleaning a substrate | Yoichi Isago, Naoaki Kobayashi, Teruo Saito, Shu Nakajima | 2007-10-30 |
| 7132293 | Method and apparatus for processing samples | Yoshimi Torii, Yoshinao Kawasaki, Yoshiaki Sato, Ryooji Fukuyama, Hironobu Kawahara | 2006-11-07 |
| 7004181 | Apparatus for cleaning a substrate | Yoichi Isago, Naoaki Kobayashi, Teruo Saito, Shu Nakajima | 2006-02-28 |
| 6989228 | Method and apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2006-01-24 |
| 6774020 | Semiconductor device and method of manufacturing the same | Shinichi Fukada, Takashi Yunogami, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2004-08-10 |
| 6656752 | Ion current density measuring method and instrument, and semiconductor device manufacturing method | Nobuyuki Mise, Tatehito Usui, Masato Ikegawa, Kazuyuki Tsunokuni, Tetsuo Ono | 2003-12-02 |
| 6656846 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +4 more | 2003-12-02 |
| 6607988 | Manufacturing method of semiconductor integrated circuit device | Takashi Yunogami, Yoshitaka Nakamura, Sukeyoshi Tsunekawa, Toshiyuki Arai, Miwako Nakahara +3 more | 2003-08-19 |
| 6555464 | Semiconductor device and method of manufacturing the same | Shinichi Fukada, Takashi Yunogami, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2003-04-29 |
| 6537415 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2003-03-25 |
| 6537417 | Apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2003-03-25 |
| 6528400 | Method of manufacturing a semiconductor device | Shinichi Fukada, Takashi Yunogami, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2003-03-04 |
| 6451665 | Method of manufacturing a semiconductor integrated circuit | Takashi Yunogami, Yuzuru Ohji, Sukeyoshi Tsunekawa, Masahiko Hiratani, Yuichi Matsui | 2002-09-17 |
| 6432835 | Process for fabricating an integrated circuit device having a capacitor with an electrode formed at a high aspect ratio | Takashi Yunogami | 2002-08-13 |
| 6340632 | Method of manufacturing a semiconductor device | Shinichi Fukada, Takashi Yunogami, Shoji Hotta, Hideo Aoki, Takayuki Oshima +1 more | 2002-01-22 |
| 6326218 | Semiconductor integrated circuit and its manufacturing method | Takashi Yunogami, Yuzuru Ohji, Sukeyoshi Tsunekawa, Masahiko Hiratani, Yuichi Matsui | 2001-12-04 |
| 6254721 | Method and apparatus for processing samples | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2001-07-03 |
| 6191045 | Method of treating surface of sample | Motohiko Yoshigai, Hiroshi Hasegawa, Hiroshi Akiyama, Takafumi Tokunaga, Tadashi Umezawa +3 more | 2001-02-20 |
| 6186153 | Plasma treatment method and manufacturing method of semiconductor device | Hiroyuki Kitsunai, Nobuo Tsumaki, Shigeru Kakuta, Kazue Takahashi | 2001-02-13 |
| 6077788 | Method and apparatus for processing samples | Yoshinao Kawasaki, Hironobu Kawahara, Yoshiaki Sato, Ryooji Fukuyama, Yoshimi Torii | 2000-06-20 |
| 6036816 | Apparatus for processing a sample having a metal laminate | Masayuki Kojima, Yoshimi Torii, Michimasa Hunabashi, Kazuyuki Suko, Takashi Yamada +5 more | 2000-03-14 |
| 5952245 | Method for processing samples | Yoshimi Torii, Yoshinao Kawasaki, Yoshiaki Sato, Ryooji Fukuyama, Hironobu Kawahara | 1999-09-14 |