Issued Patents All Time
Showing 1–25 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9039865 | Plasma processing apparatus | Ken Yoshioka, Ryoji Nishio, Tadayoshi Kawaguchi | 2015-05-26 |
| 8707899 | Plasma processing apparatus | Ryouta Kitani, Nobuhide Nunomura, Yasukiyo Morioka | 2014-04-29 |
| 8282767 | Plasma processing apparatus | Naoshi Itabashi, Tsutomu Tetsuka, Seiichiro Kanno | 2012-10-09 |
| 8071397 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Kazuhiro Jyouo, Tetsuo Ono | 2011-12-06 |
| 7955514 | Plasma processing apparatus and plasma processing method | Kazue Takahashi, Hitoshi Tamura, Motohiro Tanaka | 2011-06-07 |
| 7931776 | Plasma processing apparatus | Naoshi Itabashi, Tsutomu Tetsuka, Seiichiro Kanno | 2011-04-26 |
| 7771607 | Plasma processing apparatus and plasma processing method | Tsutomu Tetsuka, Kazuyuki Ikenaga, Tetsuo Ono, Naoshi Itabashi | 2010-08-10 |
| 7601241 | Plasma processing apparatus and plasma processing method | Tsutomu Tetsuka, Kazuyuki Ikenaga, Tetsuo Ono, Naoshi Itabashi | 2009-10-13 |
| 7442651 | Plasma etching method | Masahito Mori, Toshiaki Nishida, Naoshi Itabashi, Hideyuki Kazumi, Kazutami Tago | 2008-10-28 |
| 7411684 | Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method | Tatehito Usui, Takashi Fujii, Tetsunori Kaji | 2008-08-12 |
| 7396771 | Plasma etching apparatus and plasma etching method | Go Miya, Seiichiro Kanno, Naoshi Itabashi, Junichi Tanaka, Masahito Mori +2 more | 2008-07-08 |
| 7303998 | Plasma processing method | Tooru Aramaki, Tsunehiko Tsubone, Ryujiro Udo, Takashi Fujii | 2007-12-04 |
| 7259104 | Sample surface processing method | Tetsuo Ono, Takafumi Tokunaga, Tadashi Umezawa, Tatsumi Mizutani, Tokuo Kure +3 more | 2007-08-21 |
| 7259866 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Kazuhiro Jyouo, Tetsuo Ono | 2007-08-21 |
| 7230720 | Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method | Tatehito Usui, Takashi Fujii, Tetsunori Kaji | 2007-06-12 |
| 7224568 | Plasma processing method and plasma processing apparatus | Hiroaki Ishimura, Ken Yoshioka, Takahiro Abe, Go Saito | 2007-05-29 |
| 7194821 | Vacuum processing apparatus and vacuum processing method | Manabu Edamura, Akitaka Makino, Takanori Nakatsuka, Susumu Tauchi | 2007-03-27 |
| 7126697 | Method and apparatus for determining endpoint of semiconductor element fabricating process | Tatehito Usui, Takashi Fujii, Tetsunori Kaji, Hideyuki Yamamoto | 2006-10-24 |
| 7098138 | Plasma processing method for working the surface of semiconductor devices | Takao Arase, Go Saito, Masamichi Sakaguchi, Hiroaki Ishimura, Takahiro Shimomura | 2006-08-29 |
| 7049243 | Surface processing method of a specimen and surface processing apparatus of the specimen | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2006-05-23 |
| 7009715 | Method and apparatus for determining endpoint of semiconductor element fabricating process and method and apparatus for processing member to be processed | Tatehito Usui, Takashi Fujii, Tetsunori Kaji, Hideyuki Yamamoto | 2006-03-07 |
| 6972848 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Kazuhiro Jyouo, Tetsuo Ono | 2005-12-06 |
| 6961131 | Film thickness measuring method of member to be processed using emission spectroscopy and processing method of the member using the measuring method | Tatehito Usui, Takashi Fujii, Tetsunori Kaji | 2005-11-01 |
| 6916396 | Etching system and etching method | Akira Kagoshima, Hideyuki Yamamoto, Daisuke Shiraishi, Junichi Tanaka, Kenji Tamaki +1 more | 2005-07-12 |
| 6903826 | Method and apparatus for determining endpoint of semiconductor element fabricating process | Tatehito Usui, Takashi Fujii, Tetsunori Kaji, Hideyuki Yamamoto | 2005-06-07 |