Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071397 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Motohiko Yoshigai, Tetsuo Ono | 2011-12-06 |
| 7259866 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Motohiko Yoshigai, Tetsuo Ono | 2007-08-21 |
| 6972848 | Semiconductor fabricating apparatus with function of determining etching processing state | Tatehito Usui, Motohiko Yoshigai, Tetsuo Ono | 2005-12-06 |
| 4615761 | Method of and apparatus for detecting an end point of plasma treatment | Keiji Tada, Takashi Fujii, Gen Marumoto, Takahiro Fujisawa | 1986-10-07 |