Issued Patents All Time
Showing 1–25 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211665 | Charged particle beam device | Akito Tanokuchi, Kei Shibayama | 2025-01-28 |
| 12106930 | Charged particle beam device | Takafumi Miwa, Go Miya, Kazuma Tanii | 2024-10-01 |
| 11929231 | Charged particle beam device | Akito Tanokuchi, Kei Shibayama | 2024-03-12 |
| 11735394 | Charged particle beam apparatus | Takafumi Miwa, Go Miya | 2023-08-22 |
| 11335533 | Charged particle beam device | Akito Tanokuchi, Kei Shibayama | 2022-05-17 |
| 10903036 | Charged-particle beam device | Hiroyuki Andou | 2021-01-26 |
| 10872742 | Charged particle beam device | Takafumi Miwa, Go Miya | 2020-12-22 |
| 10790111 | Charged-particle beam device | Hiroyuki Andou | 2020-09-29 |
| 9799486 | Charged particle beam apparatus for measuring surface potential of a sample | Yasushi Ebizuka, Go Miya, Takafumi Miwa | 2017-10-24 |
| 9666408 | Apparatus and method for processing sample, and charged particle radiation apparatus | Shuichi Nakagawa, Masaru Matsushima, Masakazu Takahashi | 2017-05-30 |
| 9601307 | Charged particle radiation apparatus | Masashi Fujita, Naoya Ishigaki, Makoto Nishihara, Kumiko Shimizu | 2017-03-21 |
| 9543113 | Charged-particle beam device for irradiating a charged particle beam on a sample | Yasushi Ebizuka, Naoya Ishigaki, Masashi Fujita | 2017-01-10 |
| 9401297 | Electrostatic chuck mechanism and charged particle beam apparatus | Yasushi Ebizuka, Masaya Yasukochi, Masakazu Takahashi, Naoya Ishigaki, Go Miya | 2016-07-26 |
| 9105446 | Charged particle beam apparatus | Yasushi Ebizuka, Makoto Nishihara, Masashi Fujita | 2015-08-11 |
| 8921781 | Measurement or inspecting apparatus | Go Miya, Hiroyuki Kitsunai, Masaru Matsushima, Toru Shuto | 2014-12-30 |
| 8680466 | Electron microscope, and specimen holding method | Hiroyuki Kitsunai, Masaru Matsushima, Toru Shuto, Kazuyuki Ikenaga | 2014-03-25 |
| 8653459 | Scanning electron microscope | Hiroyuki Kitsunai, Masaru Matsushima | 2014-02-18 |
| 8653455 | Charged particle beam device and evaluation method using the charged particle beam device | Hiroyuki Kitsunai, Masaru Matsushima, Shuichi Nakagawa, Go Miya | 2014-02-18 |
| 8519332 | Semiconductor inspecting apparatus | Go Miya, Hiroyuki Kitsunai, Masaru Matsushima, Toru Shuto | 2013-08-27 |
| 8282767 | Plasma processing apparatus | Naoshi Itabashi, Tsutomu Tetsuka, Motohiko Yoshigai | 2012-10-09 |
| 8232522 | Semiconductor inspecting apparatus | Go Miya, Hiroyuki Kitsunai, Masaru Matsushima, Toru Shuto | 2012-07-31 |
| 7931776 | Plasma processing apparatus | Naoshi Itabashi, Tsutomu Tetsuka, Motohiko Yoshigai | 2011-04-26 |
| 7838792 | Plasma processing apparatus capable of adjusting temperature of sample stand | Takumi Tandou, Ken'etsu Yokogawa, Masaru Izawa | 2010-11-23 |
| 7771564 | Plasma processing apparatus | Ken'etsu Yokogawa, Takumi Tandou | 2010-08-10 |
| 7567422 | Plasma processing apparatus and plasma processing method | Hiroyuki Kitsunai, Tsunehiko Tsubone | 2009-07-28 |