Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7396771 | Plasma etching apparatus and plasma etching method | Go Miya, Naoshi Itabashi, Motohiko Yoshigai, Junichi Tanaka, Masahito Mori +2 more | 2008-07-08 |
| 7183715 | Method for operating a semiconductor processing apparatus | Ryoji Nishio, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Hideyuki Yamamoto | 2007-02-27 |
| 7138606 | Wafer processing method | Ken Yoshioka, Ryoji Nishio, Saburou Kanai, Hideki Kihara, Koji Okuda | 2006-11-21 |
| 6895179 | Wafer stage for wafer processing apparatus | Ken Yoshioka, Ryoji Nishio, Saburou Kanai, Hideki Kihara, Koji Okuda | 2005-05-17 |
| 6825617 | Semiconductor processing apparatus | Ryoji Nishio, Ken Yoshioka, Saburou Kanai, Hideki Kihara, Hideyuki Yamamoto | 2004-11-30 |
| 6771481 | Plasma processing apparatus for processing semiconductor wafer using plasma | Ryoji Nishio, Hideyuki Yamamoto, Akira Kagoshima | 2004-08-03 |
| 6747239 | Plasma processing apparatus and method | Junichi Tanaka, Hiroyuki Kitsunai, Ryoji Nishio, Hideyuki Yamamoto | 2004-06-08 |
| 6716301 | Semiconductor manufacturing apparatus and method of processing semiconductor wafer using plasma, and wafer voltage probe | Ryoji Nishio, Tsutomu Tetsuka, Junichi Tanaka, Hideyuki Yamamoto, Kazuyuki Ikenaga +1 more | 2004-04-06 |
| 6677167 | Wafer processing apparatus and a wafer stage and a wafer processing method | Hironobu Kawahara, Mitsuru Suehiro, Saburou Kanai, Toshio Masuda | 2004-01-13 |
| 6646233 | Wafer stage for wafer processing apparatus and wafer processing method | Ken Yoshioka, Ryoji Nishio, Saburou Kanai, Hideki Kihara, Koji Okuda | 2003-11-11 |
| 6590179 | Plasma processing apparatus and method | Junichi Tanaka, Hiroyuki Kitsunai, Ryoji Nishio, Hideyuki Yamamoto | 2003-07-08 |
| 6583979 | Electrostatically attracting electrode and a method of manufacture thereof | Kazue Takahasi, Youichi Itou, Saburo Kanai | 2003-06-24 |
| 6549393 | Semiconductor wafer processing apparatus and method | Hironobu Kawahara, Mitsuru Suehiro, Saburo Kanai, Ken Yoshioka | 2003-04-15 |
| 6373681 | Electrostatic chuck, and method of and apparatus for processing sample using the chuck | Tatehito Usui, Ken Yoshioka, Saburo Kanai, Youichi Itou | 2002-04-16 |
| 6370007 | Electrostatic chuck | Kazue Takahasi, Youichi Itou, Saburo Kanai | 2002-04-09 |
| 6243251 | Electrostatic chuck, and method of and apparatus for processing sample using the chuck | Tatehito Usui, Ken Yoshioka, Saburo Kanai, Youichi Itou | 2001-06-05 |
| 5946184 | Electrostatic chuck, and method of and apparatus for processing sample | Tatehito Usui, Ken Yoshioka, Saburo Kanai, Youichi Itou | 1999-08-31 |
| 5781400 | Electrostatically attracting electrode and a method of manufacture thereof | Kazue Takahashi, Youichi Itou, Saburo Kanai | 1998-07-14 |