| 7686917 |
Plasma processing system and apparatus and a sample processing method |
Toshio Masuda, Tatehito Usui, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more |
2010-03-30 |
| 7169254 |
Plasma processing system and apparatus and a sample processing method |
Toshio Masuda, Tatehito Usui, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more |
2007-01-30 |
| 6923885 |
Plasma processing system and apparatus and a sample processing method |
Toshio Masuda, Tatehito Usui, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more |
2005-08-02 |
| 6914005 |
Plasma etching method |
Muneo Furuse, Hiroshi Kanekiyo, Kunihiko Koroyasu, Tomoyuki Tamura |
2005-07-05 |
| 6815365 |
Plasma etching apparatus and plasma etching method |
Toshio Masuda, Kazue Takahashi, Tetsunori Kaji, Saburo Kanai |
2004-11-09 |
| 6755932 |
Plasma processing system and apparatus and a sample processing method |
Toshio Masuda, Tatehito Usui, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more |
2004-06-29 |
| 6677167 |
Wafer processing apparatus and a wafer stage and a wafer processing method |
Seiichiro Kanno, Hironobu Kawahara, Saburou Kanai, Toshio Masuda |
2004-01-13 |
| 6558100 |
Vacuum processing apparatus and a vacuum processing system |
Hironobu Kawahara, Kazue Takahashi, Hideyuki Yamamoto, Katsuya Watanabe |
2003-05-06 |
| 6549393 |
Semiconductor wafer processing apparatus and method |
Seiichiro Kanno, Hironobu Kawahara, Saburo Kanai, Ken Yoshioka |
2003-04-15 |
| 6537012 |
Vacuum processing apparatus and a vacuum processing system |
Hironobu Kawahara, Kazue Takahashi, Hideyuki Yamamoto, Katsuya Watanabe |
2003-03-25 |
| 6503364 |
Plasma processing apparatus |
Toshio Masuda, Tatehito Usui, Shigeru Shirayone, Kazue Takahashi |
2003-01-07 |
| 6171438 |
Plasma processing apparatus and plasma processing method |
Toshio Masuda, Kazue Takahashi, Tetsunori Kaji, Saburo Kanai |
2001-01-09 |