Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7686917 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Tatehito Usui, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more | 2010-03-30 |
| 7169254 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Tatehito Usui, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more | 2007-01-30 |
| 6923885 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Tatehito Usui, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more | 2005-08-02 |
| 6914005 | Plasma etching method | Muneo Furuse, Hiroshi Kanekiyo, Kunihiko Koroyasu, Tomoyuki Tamura | 2005-07-05 |
| 6815365 | Plasma etching apparatus and plasma etching method | Toshio Masuda, Kazue Takahashi, Tetsunori Kaji, Saburo Kanai | 2004-11-09 |
| 6755932 | Plasma processing system and apparatus and a sample processing method | Toshio Masuda, Tatehito Usui, Hiroshi Kanekiyo, Hideyuki Yamamoto, Kazue Takahashi +1 more | 2004-06-29 |
| 6677167 | Wafer processing apparatus and a wafer stage and a wafer processing method | Seiichiro Kanno, Hironobu Kawahara, Saburou Kanai, Toshio Masuda | 2004-01-13 |
| 6558100 | Vacuum processing apparatus and a vacuum processing system | Hironobu Kawahara, Kazue Takahashi, Hideyuki Yamamoto, Katsuya Watanabe | 2003-05-06 |
| 6549393 | Semiconductor wafer processing apparatus and method | Seiichiro Kanno, Hironobu Kawahara, Saburo Kanai, Ken Yoshioka | 2003-04-15 |
| 6537012 | Vacuum processing apparatus and a vacuum processing system | Hironobu Kawahara, Kazue Takahashi, Hideyuki Yamamoto, Katsuya Watanabe | 2003-03-25 |
| 6503364 | Plasma processing apparatus | Toshio Masuda, Tatehito Usui, Shigeru Shirayone, Kazue Takahashi | 2003-01-07 |
| 6171438 | Plasma processing apparatus and plasma processing method | Toshio Masuda, Kazue Takahashi, Tetsunori Kaji, Saburo Kanai | 2001-01-09 |