Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7686144 | Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing method | Takashi Shibayama, Takao Ukaji | 2010-03-30 |
| 7275627 | Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatus | — | 2007-10-02 |
| 7072777 | Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification method | Shinji Wakui, Shuichi Adachi, Hiroaki Kato | 2006-07-04 |
| 7063192 | Active vibration suppression apparatus, control method therefor, and exposure apparatus having active vibration suppression apparatus | — | 2006-06-20 |
| 6518721 | Oscillation isolator | — | 2003-02-11 |
| 6473159 | Anti-vibration system in exposure apparatus | Shinji Wakui, Michio Yanagisawa | 2002-10-29 |
| 6322060 | Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method | Yukio Takabayashi, Shinji Wakui | 2001-11-27 |
| 6170622 | Anti-vibration apparatus and anti-vibration method thereof | Shinji Wakui, Hiroaki Kato | 2001-01-09 |
| 6155542 | Vibration damping apparatus and method | Hiroaki Kato | 2000-12-05 |
| 6128552 | Anti-vibration apparatus and method | Isao Iwai, Shinji Wakui | 2000-10-03 |
| 6021991 | Active anti-vibration apparatus | Hiroaki Kato | 2000-02-08 |
| 5812958 | Anti-vibration system | — | 1998-09-22 |