Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7072777 | Exposure apparatus anti-vibration apparatus, system identification apparatus and system identification method | Takehiko Mayama, Shuichi Adachi, Hiroaki Kato | 2006-07-04 |
| 6809300 | Temperature adjusting system in exposure apparatus | Yoshinori Makita | 2004-10-26 |
| 6684132 | Active anti-vibration apparatus and exposure apparatus | Isao Iwai, Takashi Maeda | 2004-01-27 |
| 6477908 | Pedestal with vibration sensor, and exposure apparatus having the same | — | 2002-11-12 |
| 6473159 | Anti-vibration system in exposure apparatus | Michio Yanagisawa, Takehiko Mayama | 2002-10-29 |
| 6448723 | Stage system and exposure apparatus | — | 2002-09-10 |
| 6378672 | Active vibration isolation device and its control method | — | 2002-04-30 |
| 6359688 | Projection exposure apparatus and method of controlling same | Satoshi Akimoto, Shigeyuki Uzawa | 2002-03-19 |
| 6327026 | Exposure apparatus and positioning apparatus | — | 2001-12-04 |
| 6322060 | Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method | Takehiko Mayama, Yukio Takabayashi | 2001-11-27 |
| 6286644 | Active vibration isolator, exposure apparatus, exposure method and device manufacturing method | — | 2001-09-11 |
| 6213443 | Anti-vibration apparatus and exposure apparatus using the same | — | 2001-04-10 |
| 6170622 | Anti-vibration apparatus and anti-vibration method thereof | Takehiko Mayama, Hiroaki Kato | 2001-01-09 |
| 6128552 | Anti-vibration apparatus and method | Isao Iwai, Takehiko Mayama | 2000-10-03 |
| 5900707 | Stage-drive control apparatus and method, and scan-projection type exposure apparatus | — | 1999-05-04 |
| 5653317 | Vibration removing apparatus and method thereof | — | 1997-08-05 |
| 5568032 | Position control system | — | 1996-10-22 |
| 5545962 | Positioning system | — | 1996-08-13 |
| 5511930 | Precision positioning apparatus | Mikio Sato, Katsumi Asada | 1996-04-30 |
| 5504407 | Stage driving system | Mikio Sato, Katsumi Asada | 1996-04-02 |
| 5478043 | Control apparatus for vertical vibration elimination table | — | 1995-12-26 |
| 5013987 | Control system for magnetic bearing | — | 1991-05-07 |
| 4650294 | Objective lens apparatus | Ikuo Nanno, Yasuaki Morimoto, Seiji Hoshi, Hideo Hoshi | 1987-03-17 |