Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10638021 | Measurement device, processing device, and article manufacturing method | Ippei Uchida | 2020-04-28 |
| 8964290 | Microscope | Hirofumi Fujii | 2015-02-24 |
| 8916840 | Lithography apparatus, and article manufacturing method | Kimitaka Ozawa | 2014-12-23 |
| 6473159 | Anti-vibration system in exposure apparatus | Shinji Wakui, Takehiko Mayama | 2002-10-29 |
| 5062095 | Actuator and method of manufacturing thereof | Mitsuhiro Horikawa, Hiroshi Ito, Tsugio Ide, Tatsuya Shimoda, Koji Akioka | 1991-10-29 |
| 5027077 | Humidity measuring apparatus | Masahisa Ikejiri, Hajime Miyazaki, Tsukasa Muranaka, Kunihiro Inoue, Shouichi Uchiyama | 1991-06-25 |
| 5001453 | Humidity sensor | Masahisa Ikejiri | 1991-03-19 |