Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10331027 | Imprint apparatus, imprint system, and method of manufacturing article | Hiroshi Sato, Hiroshi Morohoshi | 2019-06-25 |
| 10112324 | Imprint method, imprint apparatus, and production method for article | Yoshikazu Miyajima, Shinichi Shudo | 2018-10-30 |
| 9952504 | Imprint method, imprint apparatus, and method for manufacturing device | Yoshikazu Miyajima, Shinichi Shudo | 2018-04-24 |
| 9770850 | Imprint apparatus and article manufacturing method | Makoto Mizuno, Tsuyoshi Arai, Steven C. Shackleton, Byung-Jin Choi | 2017-09-26 |
| 9339970 | Imprint apparatus, and article manufacturing method | Shinichi Shudo, Shintarou Narioka | 2016-05-17 |
| 8179518 | Exposure apparatus to correct position between reticle and substrate according to propagation time and shifting rate | — | 2012-05-15 |
| 7425238 | Substrate holding device | Yasuyo Muto | 2008-09-16 |
| 7352520 | Holding device and exposure apparatus using the same | Ryota Makino | 2008-04-01 |
| 7346414 | Moving mechanism and stage system in exposure apparatus | Hideo Tanaka, Kazunori Iwamoto | 2008-03-18 |
| 7253975 | Retainer, exposure apparatus, and device fabrication method | — | 2007-08-07 |
| 7161750 | Retainer, exposure apparatus, and device fabrication method | — | 2007-01-09 |
| 6990386 | Moving mechanism and stage system in exposure apparatus | Hideo Tanaka, Kazunori Iwamoto | 2006-01-24 |
| 6965428 | Stage apparatus, exposure apparatus, and semiconductor device manufacturing method | Yasuyo Muto, Kazunori Iwamoto, Takashi Meguro | 2005-11-15 |
| 6809802 | Substrate attracting and holding system for use in exposure apparatus | Izumi Tsukamoto, Itaru Fujita, Hideki Nogawa | 2004-10-26 |
| 6762826 | Substrate attracting and holding system for use in exposure apparatus | Izumi Tsukamoto, Itaru Fujita, Hideki Nogawa | 2004-07-13 |
| 6654096 | Exposure apparatus, and device manufacturing method | Itaru Fujita, Izumi Tsukamoto, Hideki Nogawa | 2003-11-25 |
| 6583859 | Stage device, an exposure apparatus and a device manufacturing method using the same | Yoshikazu Miyajima, Tsuneo Takashima | 2003-06-24 |
| 6493062 | Driving apparatus and exposure apparatus | Yukio Tokuda, Nobuyoshi Deguchi, Shigeyuki Uzawa, Hiromichi Hara | 2002-12-10 |
| 6322060 | Anti-vibration apparatus, exposure apparatus using the same, device manufacturing method, and anti-vibration method | Takehiko Mayama, Shinji Wakui | 2001-11-27 |
| 6307620 | Substrate holding apparatus, substrate transfer system, exposure apparatus, coating apparatus, method for making a device, and method for cleaning a substrate holding section | Shigeyuki Uzawa | 2001-10-23 |
| 6266133 | Stage device, an exposure apparatus and a device manufacturing method using the same | Yoshikazu Miyajima, Tsuneo Takashima | 2001-07-24 |
| 6208408 | Projection exposure apparatus and device manufacturing method | — | 2001-03-27 |
| 5923408 | Substrate holding system and exposure apparatus using the same | — | 1999-07-13 |
| 5691806 | Projection exposure apparatus containing an enclosed hollow structure | Yukio Tokuda | 1997-11-25 |
| 5187519 | Exposure apparatus having mount means to suppress vibrations | Yukio Tokuda | 1993-02-16 |